taotao

  The vigorous development of the semiconductor industry, as an important support for the progress of modern science and technology, continues to promote the exploration of miniaturization, higher speed and higher performance integrated circuits. This trend has directly led to a leap in the precision and technical difficulty of the semiconductor manufacturing process, and every minute link is highly dependent on advanced, high-quality and high-precision semiconductor manufacturing equipment. Silicon carbide (SiC), as an outstanding class of structural ceramic materials, shows extraordinary adaptability and stability with its excellent physical properties - high density, excellent thermal conductivity, amazing bending strength, high elastic modulus, excellent corrosion resistance and excellent high temperature resistance. It can effectively resist the extreme environment encountered during wafer processing such as epitaxial growth, etching and other stages, including strong corrosio...