taotao

  Semiconductor manufacturing is the cornerstone of the development of modern science and technology, with the industry's continuous pursuit of smaller, faster, more efficient integrated circuits, the precision and technical complexity of the manufacturing process is also increasing, every step is inseparable from high-performance, high-quality and high-precision semiconductor equipment. As a structural ceramic material with excellent performance, silicon carbide (SiC) has the characteristics of high density, high thermal conductivity, high bending strength, high elastic modulus, strong corrosion resistance, high temperature resistance, etc. It is not easy to produce bending stress deformation and thermal strain, and can adapt to the strong corrosion and ultra-high temperature reaction environment of wafer epitaxy, etching and other manufacturing links. Therefore, it has been widely used in semiconductor manufacturing processes such as grinding and polishing, epitaxial/oxidation/di...