Application And Advantages Of Plasma Assisted Polishing In AlN Substrate Processing
Aluminum nitride (AlN) ceramics, as a material with excellent thermal conductivity, mechanical properties and electrical properties, have been widely used in large-scale integrated circuits and electronic packages in recent years. Its excellent properties make it an ideal cooling substrate and packaging material. However, due to the high hardness, high brittleness and low fracture toughness of aluminum nitride ceramics, surface defects and sub-surface damage are easy to occur during processing. In order to meet the demand for ultra-smooth surface of integrated circuits, the polished surface of aluminum nitride substrate needs to achieve extremely high flatness and low surface roughness. This also makes how to effectively reduce the defects and damage in the processing has become an important research topic in the field of ultra-precision machining. In recent years, plasma assisted polishing (PAP) technology has gradually become an important means of polishing aluminu...